Fabrication Process of Nano and Optoelectronic Devices Based on Nitrided Gaas: XPS Analysis and Electrical Measurements. The Eurasia Proceedings of Science, Technology, Engineering and Mathematics, [S. l.], v. 38, p. 881–890, 2025. DOI: 10.55549/epstem.1288. Disponível em: https://epstem.net/index.php/epstem/article/view/1288. Acesso em: 18 jan. 2026.