Elaboration and Characterization of Transparent Conductive Oxide Thin Films and the Effect of Doping

Abstract

This study presents the synthesis and characterization of Al-doped ZnO (AZO) thin films on glass substrates via spray pyrolysis. The influence of Al doping (3%, 5%, 7%) on structural, optical, and electrical properties was analyzed. XRD confirmed a polycrystalline wurtzite structure with a (002) orientation, ensuring successful Al incorporation. UV-Vis spectroscopy showed enhanced transparency (70% to 78%), with the bandgap widening from 3.23 eV to 3.32 eV due to the Burstein-Moss effect. Hall Effect measurements revealed improved conductivity (3.37 × 10⁻¹ Ω⁻¹ cm⁻¹) at 3% doping, though mobility saturation limited further gains at higher levels. These results highlight AZO as a cost-effective alternative to ITO for solar cells and optoelectronics.